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Full 3" wafer scale fabrication of porous silicon chips (pore chip protein arrays -PCPA) is reported. The PCPA is developed for the analysis of protein molecules based on the fluorescence and MALDI-TOF MS detection. The surface porosification process allows the creation of chips with different surface geometries to control the physical properties of the matrix in a highly reproducible way. Copyright © 2005 by the Transducer Research Foundation, Inc.


Conference paper

Publication Date





826 - 828